Novel Dual-Pulse Actuation Voltage for Longer MEMS Switch Lifetime
نویسندگان
چکیده
Abstract—A novel dual-pulse actuation voltage has been proposed to reduce dielectric charging in micro-electromechanical system (MEMS) switch, leading to a longer switch lifetime. Mathematical and transient circuit models have been utilized to simulate dielectric charging in the RF MEMS switch, enabling the analysis of charge built-up at the switch dielectric and substrate brought about by the actuation voltage curve used. The proposed dual pulse actuation signal has shown to improve the lifetime of the RF MEMS switch as it minimizes the charge built-up.
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